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- Non-contact
- Magnetic Bearing
- No mechanical wear
- No contamination to environment
- Variable speed and load
capability
- Bi-directional
- Unlimited life/no maintenance
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- Rotary
- Diameter from 50 mm to ?
- Speed from <10 rpm to 50
krpm+
- Load capability from 2lbs to ?
- Packaging
- height and diameter
proportional to load
- controls vary for
application/stand alone/need program interface from PC or PLC
- rotor is ferromagnetic
material/reluctance configuration required
- controller can be up to 100
feet from the stator
- Linear
- Length is dependent on
available current
- Load is dependent on available
current
- Same controller as rotary
- Packaging
- "table" is ferromagnetic
material/reluctance configuration
- controller can be 100 feet
from rail
- rail height and width size
dependent on load and length
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Electrical Specifications:
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- Input voltage at 96 VDC
- Current input load dependent
(customer specified)
- Six sensors used for maximum
positioning accuracy
- All installation cables available
from Magmotor, up to main controller (customer supplied)
- All circuitry EMI protected and
cables are insulated to industry standards.
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- Clean Room - silicon wafer
- Vapor deposition
- Food processing
- Pharmaceutical
- High temperature processing
- Test & measurement
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Magmotor's Integral Suspension And
Motor (ISAM) system is specifically designed to reduce particle
generation and increase reliability for semiconductor manufacturing
equipment. ISAM uniquely integrates a motor and magnetic bearing into
one low-profile unit. Magmotor's system uses a magnetic field
generated from an integral magnetic bearing and motor to support and
spin the rotor. The non-contacting rotor floats in the process chamber
and is actively controlled by external displacement sensors. The system
is capable of indexing and locking in discrete angular positions. All
active portions of the system are located outside of the process or
vacuum chamber to improve reliability  and maintainability.
Magmotor offers speed ranges from 20 to 5,000 rpm and can support wafers
up to 300 mm in diameter. The large clearances between the rotor and
the chamber allow operation over a wide temperature range. |
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Mechanical Specifications:
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- Configurable to customer
specifications
- Rotor portion of system customer
supplied, or can be produced by Magmotor to customer specifications -
must be ferromagnetic material
- Positioning within 1 degree
radially, 0.01 inch axially
- Mounting axis not dependent on
horizontal axis
- Rated to temperatures up to 125
°C at stator
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