Magmotor's Integral Suspension And Motor (ISAM) system is specifically designed to reduce particle generation and increase reliability for semiconductor manufacturing equipment. ISAM uniquely integrates a motor and magnetic bearing into one low-profile unit. Magmotor's system staggers the activation of electromagnets to generate a rotating magnetic field to create an integral magnetic bearing to support and spin the rotor. The rotor floats in the process chamber and it’s speed is actively controlled by external displacement sensors outside the chamber. The system is capable of indexing and locking into discrete angular positions. All active portions of the system are located outside of the process or vacuum chamber to improve reliability and maintainability. This system is capable of adjusting its range of speed from 20 to 300 rpm (+/- 2%) and can support wafers up to 300 mm in diameter and up to 4 lbs of working weight. The large clearances between the rotor and the chamber allow operation over a wide temperature range.