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Magmotor's Integral Suspension And Motor (ISAM) system is specifically designed to reduce particle generation and increase reliability for semiconductor manufacturing equipment. ISAM uniquely integrates a motor and magnetic bearing into one low-profile unit. Magmotor's system staggers the activation of electromagnets to generate a rotating magnetic field to create an integral magnetic bearing to support and spin the rotor. The rotor floats in the process chamber and it’s speed is actively controlled by external displacement sensors outside the chamber. The system is capable of indexing and locking into discrete angular positions. All active portions of the system are located outside of the process or vacuum chamber to improve reliability and maintainability. This system is capable of adjusting its range of speed from 20 to 300 rpm (+/- 2%) and can support wafers up to 300 mm in diameter and up to 4 lbs of working weight. The large clearances between the rotor and the chamber allow operation over a wide temperature range.


Product Features:

  • Non-Contact

  • Magnetic Bearing

  • No Mechanical Wear

  • No Contamination to Environment

  • Variable Speed and Load Capability

  • Bi-Directional

  • Unlimited Life / No Maintenance


  • Clean Room Approved

  • Silicon Wafer Processing

  • Chemical Vapor Deposition (CVD)

  • Spatter Coating

  • Food Processing

Product Specifications:


  • Rotor diameter of 200 mm to 300 mm

  • Speed from 20 rpm to 300 rpm

  • Load carrying capability of 4 lbs

  • Packaging

    • height and diameter proportional to load

    • controls vary for application / stand alone / need program interface from PC or PLC

    • rotor is ferromagnetic material / reluctance configuration required

    • controller can be up to 100 feet from the stator

Electrical Specifications:

  • Input voltage of 120 or 240 VDC

  • Current input load dependent (customer specified)

  • Six sensors used for maximum positioning accuracy

  • All installation cables available from Magmotor, up to main controller (customer supplied)

  • All circuitry EMI protected and cables are insulated to industry standards.

Mechanical Specifications:

  • Configurable to customer specifications

  • Rotor and Stator available in 200mm or 300mm diameter options.

  • Positioning within 1 degree radially, 0.01 inch axially

  • Mounting axis not dependent on horizontal axis

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